ULTRAMEMS RESEARCH GROUP OF DR. BARIS BAYRAM, MIDDLE EAST TECHNICAL UNIVERSITY, ANKARA, TURKEY

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                                                                          Research-Thin Film Diamond-CMUT with Diamond Membranes

CMUT with Diamond Membranes

                                                    

Figure 1. Membrane deflection profile of 120 um diameter CMUT cells measured with Dektak profilometer

                                                    

Figure 2. Membrane deflection profile of 88 um diameter CMUT cells measured with Dektak profilometer

Figure 3. Membrane deflection profile of 120 um diameter CMUT cells measured with Dektak profilometer